Experience
Research Areas
Laboratory
Publications
Activities
Invited Talks
Group Members
Links News

Dr. Yue Kuo

DOW Professor
IEEE Fellow
Electrochemical Society Fellow
2007 ECS Electronics and Photonics Division Award

B.S. (1974) National Taiwan University, Taipei, Taiwan
M.S. (1978) Columbia University, NYC
Dr. Eng. Sci. (1979) Columbia University, NYC

Address:	Texas A&M University MS 3122 Brown Engineering Building Rm 235 College Station, TX 77845-3122
Phone:	(979) 845-9807
Fax:	(979) 458-8836
Alt. Fax:	(979) 845-6446
E-mail:	yuekuo@tamu.edu

2009 ECI Conf. Proc. ULSI vs TFT

2008 ECS 9^th TFT Proceedings

TFT Textbooks

2007 ECI Conf. Proc. ULSI vs TFT

---

Experience:

98 – present	Dow Professor  Chemical Engineering, Electrical Engineering, Materials Science & Engineering Texas A&M University, College Station, TX
87 – 98	Research Staff Member IBM T. J. Watson Research Center, Yorktown Heights, NY
84 – 87	Principal Process Engineer  Data General Semiconductor Division, Sunnyvale, CA
82 – 84	Visiting Research Engineer University of California, Berkeley, CA
80 – 82	Pilot Lab Manager Mobay (Bayer) Corp., R&D Dept., Charleston, SC

Research Areas:

My research is concentrated on nano and microelectronics with special interests in semiconductors and thin films. I am setting up the Thin Film Nano & Microelectronics Research Laboratory in which the activities include new materials, novel processes, and advanced devices. The ultimate goal is to create high-performance, highly reliable, manufacturable devices for current and future applications. Both fundamental and applied research topics are carried out in this laboratory. Plasma technology plays a critical role in this research. I also consult for industry and governments on these topics.

2-Mask, Self-aligned, Tri-layer TFT Graded Gate Dielectric Vertically Redundant Horizontally Redundant Others

Thin Film Transistors (TFTs) MOS Memories Biochips Applications in VLSI, LCD, etc.

RIE of Cu, ITO, a-Si:H, n^+, SiNx, metals, etc. PECVD large area, generalized mechanism on a-Si:H, n^+, SiNx, etc. PRTA Lithography Others

Semiconductors (a-Si:H, µc-Si:H, Poly-Si, Single Crystalline Si, n^+, µc- n^+, etc.) Dielectrics (SiNx, SiOx, Ta2O5, Al2O3, TiO2, SiCxOyNz, etc.) High k gate dielectrics Low k dielectrics Conductors (Cu, ITO, Mo, Al, etc.)

---

This page has been accessed

times since 10/27/2003.

---

Home, TFTs, High k Gate Dielectrics, Low k dielectrics, RIE, PECVD, Biochips, Laboratory, Publications, Activities, Presentations, Links