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Dr. Yue Kuo 

DOW Professor
IEEE Fellow
Electrochemical Society Fellow
2007 ECS Electronics and Photonics Division Award

B.S. (1974) National Taiwan University, Taipei, Taiwan
M.S. (1978) Columbia University, NYC
Dr. Eng. Sci. (1979) Columbia University, NYC

Address:	Texas A&M University MS 3122 Brown Engineering Building Rm 235 College Station, TX 77845-3122
Phone:	(979) 845-9807
Fax:	(979) 458-8836
Alt. Fax:	(979) 845-6446
E-mail:	yuekuo@tamu.edu

2011 ECI ULSI vs. TFT Proceedings

2010 ECS 10^th TFT Proceedings – 20^th Year Anniversary

2009 ECI ULSI vs. TFT Proceedings

2008 ECS 9^th TFT Proceedings

a-Si:H and Poly-Si TFT Books

2007 ECI ULSI vs. TFT Proceedings

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Experience:

98 – present	Dow Professor  Chemical Engineering, Electrical Engineering, Materials Science & Engineering  Texas A&M University, College Station, TX
87 – 98	Research Staff Member IBM T. J. Watson Research Center, Yorktown Heights, NY
84 – 87	Principal Process Engineer  Data General Semiconductor Division, Sunnyvale, CA
82 – 84	Visiting Research Engineer University of California, Berkeley, CA
80 – 82	Pilot Lab Manager Mobay (Bayer), R&D Dept., Charleston, SC

Research Areas:

My research is concentrated on nano and microelectronics with special interests in semiconductors and thin films. I am setting up the Thin Film Nano & Microelectronics Research Laboratory in which the activities include new materials, novel processes, and advanced devices. The ultimate goal is to create high-performance, highly reliable, manufacturable devices for current and future applications. Both fundamental and applied research topics are carried out in this laboratory. Plasma technology plays a critical role in this research. I also consult for industry and governments on these topics.

2-Mask, Self-aligned, Tri-layer TFT Graded Gate Dielectric TFT Vertically Redundant TFT Horizontally Redundant TFT Others

Thin Film Transistors (TFTs) Nanocrystals Embedded Nonvolatile Memories Floating-gate a-Si:H TFT Nonvolatile Memories Thin Film Solar Cells Biochips Applications in VLSI, LCD, Sensors, etc.

RIE of Cu RIE of ITO, a-Si:H, n^+, SiNx, metals, etc. PECVD large area, generalized mechanism on a-Si:H, n^+, SiNx, etc.  Pulsed Rapid Thermal Annealing Lithography Others

Semiconductors (a-Si:H, µc-Si:H, Poly-Si, n^+, µc- n^+, etc.) Dielectrics (SiNx, SiOx, Ta2O5, Al2O3, TiO2, SiCxOyNz, etc.) High k gate dielectrics Low k dielectrics Conductors (Cu, ITO, Mo, Al, etc.)

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