The k value of the low-k polyimide can
be lowered down with plasma hydrogenation.
- Lowering the k value of
the low-k polyimide
Kuo, et al. MRS 766, 333, 2003.
- Surface and Bulk Material Characteristic Changes
SIMS analysis of film surfaces after various hydrogenation and
annealing steps
Chung, et al., ECS
Proc. PV 2003-22, 2003.
FTIR spectra of Polyimide before and
after hydrogenation
Kuo, et al. MRS 766, 333, 2003.
- Topography Change After Hydrogenation
AFM images of (a) untreated, (b) room temperature 10
min hydrogenated, and (d) 200°C 10 min hydrogenated
Chung, et al., ECS
Proc. PV 2002-22, 2003.
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