Low k Dielectrics


The k value of the low-k polyimide can be lowered down with plasma hydrogenation.

- Lowering the k value of the low-k polyimide

Kuo, et al. MRS 766, 333, 2003.

- Surface and Bulk Material Characteristic Changes

SIMS analysis of film surfaces after various hydrogenation and annealing steps

Chung, et al., ECS Proc. PV 2003-22, 2003.

FTIR spectra of Polyimide before and after hydrogenation

Kuo, et al. MRS 766, 333, 2003.

-   Topography Change After Hydrogenation

AFM images of (a) untreated, (b) room temperature 10 min hydrogenated, and (d) 200C 10 min hydrogenated

Chung, et al., ECS Proc. PV 2002-22, 2003.


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